| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a negative pressure action device which is manufactured to be comparatively small in size, and consecutively performs negative pressure treatment of an object. <P>SOLUTION: The negative pressure action device 10 includes: a negative pressure action part 12 that performs the negative pressure treatment of the object F inside; a negative pressure forming device 14 that forms negative pressure in the negative pressure action part 12; a conveying device 16 that conveys the object F in the negative pressure action part 12; a put-in device 18 that puts the object F in the negative pressure action part 12 from the external EX while keeping the negative pressure; and a discharge device 20 that discharges the object F from the negative pressure action part 12 to the external EX while keeping the negative pressure. The put-in device 18 and the discharge device 20 each include a switching means 38 that switches to a liquid shutoff condition that the external and the negative pressure action part are shut off through liquid L, an external side opening condition that the external side is opened and the negative pressure action part side is closed, and a negative pressure side opening condition that the external side is closed and the negative pressure action part side is opened. While switching the conditions, the object F is put in the negative pressure action part from the external or discharged to the external from the negative pressure action part. <P>COPYRIGHT: (C)2013,JPO&INPIT |
