发明名称 CRUCIBLE, VAPOR DEPOSITION SYSTEM AND METHOD USING THE CRUCIBLE
摘要 A crucible includes a main body and a cover. The main body includes a first end surface, an opposite second end surface, a hollow part and a solid part. The hollow part and the solid part extend from the first end surface to the second end surface. The hollow part defines a receiving space. The first end surface defines an opening communicating with the receiving space, and includes a step positioned between the hollow part and the solid part. The solid part includes a heat end adjacent to the step. The heat end is heated by an electro-beam. The cover covers the opening, and defines a number of gas holes. The main body and the cover are made of thermal conductive refractory material.
申请公布号 US2013011556(A1) 申请公布日期 2013.01.10
申请号 US201113248036 申请日期 2011.09.29
申请人 HON HAI PRECISION INDUSTRY CO., LTD.;LIN JUIN-HONG 发明人 LIN JUIN-HONG
分类号 C23C16/448 主分类号 C23C16/448
代理机构 代理人
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