| 摘要 |
A cryopump includes an array of a plurality of cryosorption panels which are surrounded by a cryopump inner open space opened to a cryopump opening and a radiation shield which surrounds the cryopump inner open space. At least one of the plurality of cryosorption panels includes a panel end which protrudes toward the radiation shield in the cryopump inner open space, and the panel end has a region from which an adsorbent is absent.
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