NON-POLAR SUBSTRATE HAVING HETERO-STRUCTURE AND METHOD FOR MANUFACTURING THE SAME, AND NITRIDE-BASED LIGHT EMITTING DEVICE USING THE SAME

摘要

Disclosed are a non-polar hetero substrate, a method for manufacturing the same, and a nitride-based light emitting device using the same. The non-polar hetero substrate includes a non-polar base substrate, a nitride base layer disposed on the substrate, a defect reduction layer disposed on the nitride base layer, the defect reduction layer including a plurality of air gaps, and a nitride semiconductor layer disposed on the defect reduction layer.