LITHIUM TARGET AUTOMATIC REPRODUCING DEVICE AND LITHIUM TARGET AUTOMATIC REPRODUCING METHOD

摘要

PROBLEM TO BE SOLVED: To obtain a lithium target automatic reproducing device which is equipped with a measurement function of the lithium film thickness of a lithium target and can automatically reproduce the lithium target consumed by moving a vapor deposition source to the lithium target, and to produce a lithium target automatic reproducing method.

SOLUTION: A lithium target automatic reproducing device 106 can automatically reproduce lithium of a lithium target. The lithium target automatic reproducing device 106 includes a lithium vapor deposition unit 1 which vapor-deposits lithium on the lithium target, and the lithium vapor deposition unit 1 can be moved to the lithium target side to enable lithium to be vapor-deposited on the lithium target.

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