摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fine structure capable of reducing the reflectance of incident light and diffraction light. <P>SOLUTION: An inventive fine structure (1) comprises a substrate (11) and a fine structure layer (12) which includes a plurality of protrusions (13) or recesses (15) extending from a principal plane of the substrate (11) in an out-of-plane direction and is provided on the substrate (11). The fine structure layer (12) has a plurality of projecting rows (13-1 to 13-N) in which a plurality of protrusions (13) are arranged at an irregular interval in the Y-axis direction in the principal plane of the substrate (11). In the X-axis direction orthogonal to the Y-axis direction in the principal plane of the substrate (11), a plurality of projecting rows (13-1 to 13-N) are arranged adjacent to each other at pitches Px. <P>COPYRIGHT: (C)2013,JPO&INPIT |