<p>A method of processing a flexible substrate includes providing a flexible substrate having a polymerized surface; emitting an electron beam; exposing the polymerized surface to the electron beam; modifying the polymerized surface by the exposure to the electron beam; and depositing a barrier layer on the modified surface.</p>
申请公布号
WO2013004301(A1)
申请公布日期
2013.01.10
申请号
WO2011EP61330
申请日期
2011.07.05
申请人
APPLIED MATERIALS, INC.;HOFFMANN, GERD;KLEMM, GUENTER;LOTZ, HANS-GEORG;WOLFF, ALEXANDER
发明人
HOFFMANN, GERD;KLEMM, GUENTER;LOTZ, HANS-GEORG;WOLFF, ALEXANDER
