发明名称 ALIGNMENT MARKS AND ALIGNMENT METHODS FOR ALIGNING BACKSIDE COMPONENTS TO FRONTSIDE COMPONENTS IN INTEGRATED CIRCUITS
摘要 An imaging system may include an imager integrated circuit with frontside components such as imaging pixels and backside components such as color filters and microlenses. The imager integrated circuit may be mounted to a carrier wafer with alignment marks. Bonding marks on the carrier wafer and the imager integrated circuit may be used to align the carrier wafer accurately to the imager integrated circuit. The alignment marks on the carrier wafer may be read, by fabrication equipment, to align backside components of the imager integrated circuit, such as color filters and microlenses, with backside components of the imager integrated circuit, such as photodiodes.
申请公布号 US2013009268(A1) 申请公布日期 2013.01.10
申请号 US201213540905 申请日期 2012.07.03
申请人 TESTA GIANLUCA;DE AMICIS GIOVANNI 发明人 TESTA GIANLUCA;DE AMICIS GIOVANNI
分类号 H01L31/18;H01L27/146 主分类号 H01L31/18
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