| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical element having an antireflection function, which realizes high feasibility in formation and low scattering as well as low reflectivity, through regulating variations of a fine rugged shape in height direction. <P>SOLUTION: An optical element having an antireflection function comprises: an optical member having an optical surface; and structures formed on the optical surface of the optical member. The structures vary in height, and when the standard deviation of the height variation of the structure is represented by σ(nm), the average interval of the structures is represented by p(nm), and the shortest wavelength in a wavelength area for use is represented by λ(nm), 0.003≤(σ/λ)*(p/λ)≤0.06 and 10≤p≤λ/2 are satisfied. <P>COPYRIGHT: (C)2013,JPO&INPIT |
