| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technology which is advantageous in terms of the lack of flow of heat into a device, when transmitting a large amount of signal to the device in a vacuum chamber at a high rate. <P>SOLUTION: The drawing device performing the drawing on a substrate by means of a plurality of charged particle beams comprises a blanking deflector disposed in a decompression chamber and performs blanking of the plurality of charged particle beams, respectively, a device placed in an external chamber having an atmospheric pressure higher than the pressure in the decompression chamber and controlling the blanking deflector, and a first substrate. The first substrate constitutes a partition partitioning the decompression chamber and the external chamber, and includes an electrode filling a through hole formed in a region becoming the partition. The device is connected electrically with the blanking deflector via the electrode. <P>COPYRIGHT: (C)2013,JPO&INPIT |
