发明名称 VIBRATOR AND VIBRATORY GYROSCOPE
摘要 <p>The present invention implements a vibrator having node points the positions of which are stationary and having a low resonance frequency without depending on only the adjustment of thickness and width dimension, and a vibratory gyroscope capable of detecting angular speed with high sensitivity using the vibrator. A vibrator (1) of a vibratory gyroscope (11) is provided with a circular annular part (2), a rectangular annular part (3), and connection parts (4A-4D). The rectangular annular part (3) is disposed outside the circular annular part (2). The connection parts (4A-4D) connect the circular annular part (2) and the rectangular annular part (3). The rectangular annular part (3) is configured from linear beam parts (3A-3D). The connection parts (4A-4D) connect the circular annular part (2) and the centers of the beam parts (3A-3D).</p>
申请公布号 WO2013005625(A1) 申请公布日期 2013.01.10
申请号 WO2012JP66501 申请日期 2012.06.28
申请人 MURATA MANUFACTURING CO., LTD.;FUJIMOTO, KATSUMI;YONEDA, TOSHIMARO;HADA, TAKUO;HORIUCHI, HIDEYA 发明人 FUJIMOTO, KATSUMI;YONEDA, TOSHIMARO;HADA, TAKUO;HORIUCHI, HIDEYA
分类号 G01C19/5677;H01L41/08;H01L41/09;H01L41/187 主分类号 G01C19/5677
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