发明名称 Inductive devices and low flow plasmas using them
摘要 Certain embodiments described herein are directed to devices that can be used to sustain a low flow plasma. In certain examples, the low flow plasma can be sustained in a torch comprising an outer tube and an auxiliary tube within the outer tube. In some examples, the auxiliary tube comprises an effective length to match the shape of a low flow plasma sustained in the torch using a flat plate electrode. Methods and systems using the torches are also described.
申请公布号 AU2011248179(A1) 申请公布日期 2013.01.10
申请号 AU20110248179 申请日期 2011.05.04
申请人 PERKINELMER HEALTH SCIENCES, INC. 发明人 MORRISROE, PETER J.
分类号 B23K10/00 主分类号 B23K10/00
代理机构 代理人
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