| 摘要 |
<P>PROBLEM TO BE SOLVED: To process a workpiece in one processing with high accuracy. <P>SOLUTION: A processing method includes: changing a relative orientation of a unit removal shape and the workpiece; positioning a relative position of a rotation shaft of a rotating polishing tool and the workpiece so as to have a relative orientation having a smallest difference among differences between a calculated removal shape and a target removal shape determined for each of the relative orientations; and processing the workpiece at a relative speed in accordance with a dwell time distribution. Accordingly, the processing method is capable of processing the workpiece with less error in one scanning for processing, thereby increasing the precision of a workpiece surface and improving the efficiency of processing by reducing the frequency of repetition of the processing. <P>COPYRIGHT: (C)2013,JPO&INPIT |
