发明名称 VACUUM VESSEL
摘要 <P>PROBLEM TO BE SOLVED: To provide a vacuum vessel in which proof stress is not deteriorated and the cost of a welding operation is lower than the conventional one even if it is enlarged. <P>SOLUTION: The vacuum vessel 10 includes: a hollow box-type vessel 11; a first flange plate 13a larger than the first wall face 12<SB POS="POST">1</SB>of the box-type vessel 11 and adhering tightly to and fixed to the first wall face 12<SB POS="POST">1</SB>; a first through hole 15a provided through the first flange plate 13a and the first wall face 12<SB POS="POST">1</SB>and allowing the hollow part 14 of the box-type vessel 11 and an outside space to communicate with each other; a first opening 16a provided at a second wall face 12<SB POS="POST">2</SB>connected to the first wall face 12<SB POS="POST">1</SB>of the box-type vessel 11; and a first door plate 17a larger than the first opening 16a and arranged at a position to cover the first opening 16a detachably. The first flange plate 13a and the first wall face 12<SB POS="POST">1</SB>are integrally molded. Thus, cracks are not generated between the first flange plate 13a and the first wall face 12<SB POS="POST">1</SB>and a defect in air tightness is not caused even if it is repeatedly used. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013007064(A) 申请公布日期 2013.01.10
申请号 JP20110138324 申请日期 2011.06.22
申请人 ULVAC JAPAN LTD 发明人 SAGAWA TOMOHIKO;KOSHIMIZU KOJI;ODA MINORU
分类号 C23C14/34;B01J3/03 主分类号 C23C14/34
代理机构 代理人
主权项
地址