| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a temperature measuring device capable of suitably measuring a temperature of a measuring object by using light interference, a substrate processing device and a temperature measuring method. <P>SOLUTION: The temperature measuring device 1 includes a data input part 16, a peak interval calculation part 17, a light path length calculation part 20 and a temperature calculation part 21. The data input part 16 inputs a spectrum of interference light acquired by interference between a measuring beam reflected on a front face 13a of a measuring object 13 and a measuring beam reflected on a rear face 13b when a measuring beam is emitted to the front face 13a of the measuring object 13. The peak interval calculation part 17 calculates a peak interval of the input spectrum. The light path length calculation part 20 calculates light path length on the basis of the peak interval. The temperature calculation part 21 calculates a temperature of the measuring object 13 on the basis of the light path length. <P>COPYRIGHT: (C)2013,JPO&INPIT |
