发明名称 |
SYSTEMS AND METHODS FOR PROVIDING TEMPERATURE STABILITY OF ACOUSTO-OPTIC BEAM DEFLECTORS AND ACOUSTO-OPTIC MODULATORS DURING USE |
摘要 |
The invention provides a method of laser processing with a thermally stabilized acousto-optic beam deflector. The method includes the steps of: generating a sequence of RF pulses corresponding to a sequence of laser pulses having a laser pulse repetition rate, the RF pulses including transmitting RF pulses at transmitting RF frequencies and non- transmitting RF pulses at non-transmitting RF frequencies for causing the sequence of laser pulses to be deflected in respective transmitting and non-transmitting directions, each RF pulse comprising an RF frequency, an RF amplitude and a duration; controlling each RF pulse such that the sequence of RF pulses provides a modulated RF drive signal that is modulated to provide a balanced thermal loading on the acousto-optic deflector; applying the modulated RF drive signal to the acousto-optic deflector; and deflecting at least one laser pulse with the acousto-optic deflector using the modulated RF drive signal to irradiate a selected target position with a predetermined pulse energy. |
申请公布号 |
WO2013006691(A2) |
申请公布日期 |
2013.01.10 |
申请号 |
WO2012US45534 |
申请日期 |
2012.07.05 |
申请人 |
GSI GROUP CORPORATION;CORDINGLEY, JAMES;MALTSEV, DIMITRY |
发明人 |
CORDINGLEY, JAMES;MALTSEV, DIMITRY |
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