| 摘要 |
PROBLEM TO BE SOLVED: To improve the work efficiency, when a worker selects shape parameters to be calculated from measuring data, in a shape analyzer and shape analysis program for analyzing uneveness data of a surface created by a cylindrical shape measuring device for scanning the surface of the sample with a gauge head, by relatively rotating the sample to the gauge head, and for calculating the shape parameters of the sample, such as circularity. SOLUTION: This shape analyzer 1 comprises a data selection input section 12 for making a user select one or more uneven data used for calculation of the shape parameter, a shape parameter list creating section 14 for creating a list 13 of a calculable shape parameter, according to the number of measuring surfaces where the uneveness data selected by the data selection input section 12 is measured and surface-direction information, and a parameter selection input section 15 for making the user select the shape parameter to be calculated from the list 13 created by the shape parameter list creating section 14. COPYRIGHT: (C)2009,JPO&INPIT |
