发明名称 |
Chemically amplified positive resist composition and patterning process |
摘要 |
<p>A chemically amplified positive resist composition comprising (A) a substantially alkali insoluble polymer having an acidic functional group protected with an acid labile group, (B) an acid generator, and (C) a perfluoroalkyl ethylene oxide adduct or a nonionic fluorinated organosiloxane compound is coated, exposed to UV radiation having a wavelength of at least 150 nm, and developed. The composition has advantages of uniformity and minimized edge crown upon coating, and no scum formation after development.</p> |
申请公布号 |
EP2479611(A3) |
申请公布日期 |
2013.01.09 |
申请号 |
EP20120151375 |
申请日期 |
2012.01.17 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
YASUDO, HIROYUKI;TAKEMURA, KATSUYA;KOIKE, NORIYUKI |
分类号 |
G03F7/004;G03F7/039;G03F7/075;H05K1/00;H05K3/00 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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