Method of manufacturing a semi-conductor element and semi-conductor element

摘要

A method of manufacturing of a semi-conductor element, comprising the following steps: providing a substrate (12), the substrate (12) having a surface (24), the surface (24) being partially coated with a coating (14) and having at least one uncoated area (16), and growing a truncated pyramid (26) of gallium nitride on the uncoated area (16), wherein the method comprises the following step: growing at least one gallium nitride column (32) on the truncated pyramid (26).