| 摘要 |
PURPOSE: A mullite composition for low temperature cofiring is provided to sinter at low temperature and to have the coefficient of thermal expansion of similar level of Si wafer. CONSTITUTION: A mullite composition for low temperature cofiring comprises mullite, SiO2, and one or more of Y2O3, CaCO3, SrCO3, BaCO3 and La2O3. The mullite composition for low temperature cofiring additionally includes MgO. The addition content of SiO2 is 0.2-3 wt% and Y2O3 is 0.2-3wt%. The addition content of CaCO3 is 0.2-3 wt% and SrCO3 is 0.2-3wt%. The addition content of BaCO3 is 0.2-3 wt% and La2O3 is 0.2-3wt%. The addition content of MgO is 0.2-2wt%. The temperature of the low temperature cofiring is 1350-1450 deg. Celsius. [Reference numerals] (AA) Bulk density(g/cm^3); (BB) Composition; (CC) Arranging table |
