| 摘要 |
[Object] To provide, in particular, a Z-axis compatible physical quantity sensor that is small and has high sensitivity. [Solving Means] A physical quantity sensor includes a support substrate, anchor portions 21 and 22 fixed to a top surface of the support substrate, a movable portion 6 positioned above the support substrate and supported by the anchor portions 21 and 22 with support portions 8 to 11 provided therebetween such that the movable portion 6 is movable in a height direction, and detection portions for detecting a displacement of the movable portion. The support portions include beam portions 30 to 33 provided between the movable portion 6 and the anchor portions 21 and 22 such that spring portions 29 and 34 are provided between the beam portions 30 to 33 and each of the movable portion 6 and the anchor portions 21 and 22, the beam portions 30 to 33 having a rigidity higher than a rigidity of the spring portions. The movable portion 6 translates in the height direction owing to twisting of the spring portions and displacements in the height direction of distal ends of the beam portions, the movable portion being supported at the distal end. |
