| 摘要 |
PURPOSE: An impedance matching apparatus, a linear motion module, and a radio frequency power supplying apparatus are provided to have fast response speed by including a linear motion driving unit. CONSTITUTION: An impedance matching apparatus(100) is connected to an RF power(190). The impedance matching apparatus includes a first variable condenser(112) including a first axis(112a) and a first linear motion unit(121) supplying linear motion. The impedance matching apparatus includes a first insulating joint(142) and a first displacement sensor(124). A first electrode of a first variable condenser is connected to one side of a first inductor. [Reference numerals] (121) First linear motion unit; (122) Second linear motion unit; (123) Motion control unit; (124) First displacement sensor; (125) Second displacement sensor; (126) Control unit; (AA) External interface |
