发明名称 |
Process for producing die roll |
摘要 |
A production method of a mold roller for a roller nanoimprint apparatus for producing an optical element,the optical element comprising a nanostructure film including recesses and protrusions in nanometer size formed continuously on a surface of the nanostructure film,the nanostructure film including a nanostructure-free region free from the recesses and protrusions in nanometer size in both ends along a longitudinal direction of the nanostructure film,the nanostructure film further including a moth-eye structure including a plurality of conical protrusions each having a size smaller than a wavelength of visible light, andthe production method comprising the steps of:anodizing an aluminum tube in which a region other than a region where a concave pattern for forming the plurality of conical protrusions is to be formed is masked with a masking material, andetching the aluminum tube, the anodizing and the etching being repeated. |
申请公布号 |
EP2543495(A1) |
申请公布日期 |
2013.01.09 |
申请号 |
EP20120006895 |
申请日期 |
2008.11.19 |
申请人 |
SHARP KABUSHIKI KAISHA |
发明人 |
YAMADA, NOBUAKI;FUJII, AKIYOSHI;TAGUCHI, TOKIO;HAYASHI, HIDEKAZU |
分类号 |
B29C59/04;B29C33/38;B29C33/42;B29L11/00;C25D11/02;G02B1/11;G03F7/00 |
主分类号 |
B29C59/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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