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发明名称
摘要
申请公布号	JP5117146(B2)	申请公布日期	2013.01.09
申请号	JP20070234489	申请日期	2007.09.10
申请人		发明人
分类号	H05B3/74;H01L21/02;H05B3/10;H05B3/18;H05B3/20	主分类号	H05B3/74
代理机构		代理人
主权项
地址

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