| 摘要 |
<p>PURPOSE: A data display device for manufacturing a semiconductor is provided to search data and to display a data revision history by displaying data of an upper and lower system controllers on an internet browser. CONSTITUTION: Lower system controllers(120,130) are controlled by an upper system controller(110). A display unit(140) displays data of the upper and the lower system controllers on an internet browser. The data of the upper and the lower system controllers includes a version, setting information, warning data, teaching data, and recipe data of the upper and the lower system controllers. [Reference numerals] (110) Upper system controller; (120) First lower system controller; (130) Second lower system controller; (140) Display unit</p> |
