A TRANSFER UNIT FOR AUTO SHILLINGS APPARATUS OF THE SUBSTRATE

摘要

PURPOSE: A transfer unit for automatic substrate sealing apparatus is provided to automatically conduct substrate sealing, thereby preventing etchant from permeating between substrates in an etching process. CONSTITUTION: A cassette loading and transferring unit(200) transfers a cassette(C). A loading unit(300) successively takes out a substrate(S) from the cassette. A substrate loading unit(400) performs horizontal movement and rotation of the substrate in the loading condition. A sealing unit(500) coats the upper surface of the substrate with a sealant. A curing unit(600) cures the coated sealant. An unloading unit(700) successively inserts the substrate into the cassette.