发明名称 Tunable filter, light source apparatus, and spectral distribution measuring apparatus
摘要 A tunable filter including: a polarization splitter that splits input light into two linearly polarized light rays of mutually orthogonal vibration directions; a wavelength dispersion spectroscopic element that splits the two linearly polarized light rays into two spectral images having spatial spread in one direction; and a reflective spatial modulator device that modulates and reflects linearly polarized light in each wavelength region for the two spectral images independently from each other. Modulated light reflected at the reflective spatial modulator device reenters the wavelength dispersion spectroscopic element and the polarization splitter, thereby splitting and outputting the modulated light, as output light in a wavelength region modulated by the reflective spatial modulator device and output light in a wavelength region not modulated, and input light and reentered light to the polarization splitter and input light and reentered light to the wavelength dispersion spectroscopic element are parallel light fluxes.
申请公布号 US8351033(B2) 申请公布日期 2013.01.08
申请号 US20090627842 申请日期 2009.11.30
申请人 NIKON CORPORATION;KATSUNUMA ATSUSHI 发明人 KATSUNUMA ATSUSHI
分类号 G01J3/28 主分类号 G01J3/28
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