发明名称 |
Conductive layer including implanted metal ions |
摘要 |
A nano imprint master and a method of manufacturing the same are provided. The method includes: implanting conductive metal ions into a substrate including quartz to form a conductive layer inside the quartz substrate; coating a resist on the quartz substrate in which the conductive layer is formed, to form a resist coating layer; exposing the resist coating layer to an electron beam to form micropatterns; etching the quartz substrate by using the resist coating layer, in which the micropatterns are formed, as a mask; and removing the resist coating layer to obtain a master in which micropatterns are formed.
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申请公布号 |
US8349527(B2) |
申请公布日期 |
2013.01.08 |
申请号 |
US201113113534 |
申请日期 |
2011.05.23 |
申请人 |
SEAGATE TECHNOLOGY INTERNATIONAL;KIM HAE-SUNG;KO HYOUNG-SOO;HONG SEUNG-BUM;SOHN JIN-SEUNG;CHOA SUNG-HOON;LIM CHEE-KHENG |
发明人 |
KIM HAE-SUNG;KO HYOUNG-SOO;HONG SEUNG-BUM;SOHN JIN-SEUNG;CHOA SUNG-HOON;LIM CHEE-KHENG |
分类号 |
G03F1/00 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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