发明名称 |
Method and apparatus for laser machining |
摘要 |
A method and apparatus is presented for laser machining complex features in workpieces using programmable laser focal spot shapes. A deformable mirror is inserted into the laser beam path of a laser machining system and programmed to alter the shape of the laser beam focal spot in real time as the workpiece is being laser machined in order to achieve improved control over the shape and size of laser machined features.
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申请公布号 |
US8350187(B2) |
申请公布日期 |
2013.01.08 |
申请号 |
US20090413531 |
申请日期 |
2009.03.28 |
申请人 |
ELECTRO SCIENTIFIC INDUSTRIES, INC.;BALDWIN LEO |
发明人 |
BALDWIN LEO |
分类号 |
B23K26/00 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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