发明名称 METHOD OF MANUFACTURING A NANOWIRE
摘要 PURPOSE: A nanowire manufacturing method is provided to mass-produce nanowires with high uniformity at room temperature at a low cost. CONSTITUTION: A nanowire manufacturing method comprises the following steps: forming a plurality of lattice patterns(131) on a substrate(110); forming a nanowire(170) on the lattice pattern; and separating the lattice pattern from the nanowire. The first step comprises the following steps: forming a lattice base layer(130) made of polymer material on a substrate; and pressing the lattice base layer into an imprint mold. The second step comprises the following steps: forming a nanowire base layer(150) by depositing nanowire material on the lattice pattern; and wet etching the nanowire base layer. The third step comprises the following steps: separating the lattice pattern from the nanowire by using an adhesive(310); and separating the adhesive from the nanowire by irradiating with ultraviolet rays.
申请公布号 KR20130002527(A) 申请公布日期 2013.01.08
申请号 KR20110063528 申请日期 2011.06.29
申请人 LG INNOTEK CO., LTD. 发明人 LEE, YOUNG JAE;YOO, KYOUNG JONG;LEE, JUN;KIM, JIN SU;PARK, JAE WAN
分类号 B82B3/00;B82B1/00;B82Y40/00 主分类号 B82B3/00
代理机构 代理人
主权项
地址