Integrated circuits on a wafer and methods for manufacturing integrated circuits

摘要

Integrated circuits (1) on a wafer comprise a wafer substrate (2), a plurality of integrated circuits (1) formed lattice-like in rows and columns on the wafer substrate (2), and first and second saw lines (4, 5) separating the integrated circuits (1). The first saw lines (4) run parallel and equidistant with respect to each other in a first direction (x) defined by the rows and the second saw lines (5) run parallel and equidistant with respect to each other in a second direction (y)defined by the columns. The integrated circuits (1) on the wafer further comprise a plurality of process control modules (3) formed on the wafer substrate (2) such that a given process control module (3) of the plurality of process modules (3) is bounded by two consecutive first saw lines (4) as well as by two consecutive second saw lines (5).