EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION METHOD

摘要

PROBLEM TO BE SOLVED: To improve the CE of an EUV light generation device.

SOLUTION: An extreme ultraviolet light generation device comprises: a laser beam generation system; a laser control system controlling at least any one of light intensity and output timing of at least one laser beam outputted from the laser light generation system; a chamber having at least one incident port for introducing at least one laser beam outputted from the laser beam generation system into the chamber; and a target supply unit provided in the chamber and supplying a target substance to a predetermined region in the chamber.

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