| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a ceramic heater capable of surely preventing an increase in a remaining coal amount associated with using an acrylic binder while improving bonding force using the acrylic binder. <P>SOLUTION: A ceramic heater 4 includes a base body 21 and a heating element 22 embedded in the base body 21. A manufacturing method of the ceramic heater 4 includes: an element molding step of obtaining an element compact 31 to serve as the heating element 22; a supporter molding step of obtaining a supporter 51 in which the element compact 31 and an insulating compact 43 to serve as a base body 21 were integrated by embedding the element compact 31 in a base material including an insulating ceramic powder and a binder and pressing the base material; an inert gas calcination step of calcinating the supporter 51 under an inert gas atmosphere; and an oxidation calcination step of calcinating the supporter 51 under an oxygen atmosphere after the inert gas calcination step. The binder is an acrylic binder. In the inert gas calcination step, a weight loss of the binder is higher than or equal to 92% and less than or equal to 95%. <P>COPYRIGHT: (C)2013,JPO&INPIT |
