METHOD FOR MANUFACTURING THIN-FILM LITHIUM SECONDARY BATTERY, SUBSTRATE PROCESSING APPARATUS, AND THIN-FILM LITHIUM SECONDARY BATTERY

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a thin-film lithium secondary battery which allows the increase in the yield while suppressing the reduction in the capacity, a substrate processing apparatus, and a thin-film lithium secondary battery.

SOLUTION: The method for manufacturing a thin-film lithium secondary battery comprises: a film formation step where a positive electrode layer made of lithium cobaltate is grown on a substrate S with a current collector layer formed thereon; and a crystallization step where the positive electrode layer is heated to accelerate the crystallization of the lithium cobaltate. The crystallization step includes: a first heating step where the crystallization of the lithium cobaltate of a low-temperature phase is accelerated in part of the positive electrode layer by keeping the temperature of the positive electrode layer at a first temperature; and a second heating step where the crystallization of the lithium cobaltate of a high-temperature phase is accelerated in the positive electrode layer by keeping the temperature of the positive electrode layer at a second temperature higher than the first temperature after the first heating step.

COPYRIGHT: (C)2013,JPO&INPIT