| 摘要 |
<P>PROBLEM TO BE SOLVED: To properly determine whether or not foreign matter adheres to a conveyance object such as a disk. <P>SOLUTION: A conveyance device (10) includes: first conveyance means (21) for conveying a conveyance object (1) by being in contact with the conveyance object (1) while rotating; second conveyance means (31) for conveying the conveyance object (1) in cooperation with the first conveyance means (21) by rotating while holding the conveyance object (1) between the second conveyance means (31) and the first conveyance means (21); and determination means (40) for determining whether or not foreign matter different from the conveyance object (1) is conveyed together with the conveyance object (1) on the basis of a mode of rotation in each of the first and second conveyance means (21) and (31). <P>COPYRIGHT: (C)2013,JPO&INPIT |
