| 摘要 |
<P>PROBLEM TO BE SOLVED: To easily adjust backlash to a proper range even when a gear becomes worn, in a substrate transfer robot including a pair of flexible arms comprising driven arm members 32<SB POS="POST">1</SB>, 32<SB POS="POST">2</SB>connected to a drive arm members through joints, and a hand 4 for supporting a substrate, wherein gears 5<SB POS="POST">1</SB>, 5<SB POS="POST">2</SB>are respectively fixed to respective tips of the driven arm members of both arms, and both gears are pivotally supported on the hand while meshed with each other. <P>SOLUTION: Respective spindles 6<SB POS="POST">1</SB>, 6<SB POS="POST">2</SB>for pivotally supporting the respective gears 5<SB POS="POST">1</SB>, 5<SB POS="POST">2</SB>on the hand 4 are coupled to the hand 4 through eccentric portions 6a which are eccentric to the respective spindles 6<SB POS="POST">1</SB>, 6<SB POS="POST">2</SB>. Furthermore, marks 6b for visually checking a rotation angle of the eccentric portions 6a are fixed to outer end surface of the eccentric portions 6a. <P>COPYRIGHT: (C)2013,JPO&INPIT |
