| 摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently remove impurities from chlorosilane distillates to highly purify the chlorosilanes. <P>SOLUTION: Crude chlorosilanes, which contain trichlorosilane, are obtained in a hydrogenation process 101 and in a chlorination process 102. In an impurity conversion process 103, an organic compound is added as the distillation aids, and phosphorus impurities and boron impurities are converted to substances having a high boiling point. Chlorosilane distillates, which are sent to a purification process 104, contain not only chlorosilanes but also the substances having a high boiling point which are produced by the excessive part of the organic compound and the conversion of the impurities. The chlorosilane distillates, which are sent to the purification process 104, are introduced into an evaporator 104a to vaporize the trichlorosilanes. The vapor of the chlorosilanes is fed to a distillation tower 104b. The impurities converted to the substance having a high boiling point remain as a tank bottom. The vapor produced in the evaporator 104a is fed to the distillation tower 104b, and the chlorosilanes, which contain the trichlorosilanes as the main component, are separated and purified. <P>COPYRIGHT: (C)2013,JPO&INPIT |
