| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inexpensive alignment device with a simple structure, which can reliably detect a positional relationship between a mask and a substrate for the alignment of the substrate to the mask within a treatment chamber of a vacuum treatment apparatus. <P>SOLUTION: The device includes: a fixed holding means 5 which holds either one of the substrate W and the mask W for limiting a treatment range to the substrate, which are oppositely disposed within a vacuum chamber 1; and a holding means 2 which holds the other thereof, the holding means being relatively movable to the fixed holding means. Optical paths 52R, 52L are formed within the fixed holding means, one end side thereof being opened toward the substrate or mask held by the movable holding means, and the other end side thereof being opened toward a wall surface defining the treatment chamber. The device further includes: a light source 61 causing light to be incident from the other end side of the optical paths; an imaging means 62 which images the other through the optical paths from the other end side; and a control means C which performs alignment by relatively moving the movable holding means according to an output from the imaging means. <P>COPYRIGHT: (C)2013,JPO&INPIT |
