LASER IRRADIATION APPARATUS AND LASER IRRADIATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a laser irradiation apparatus which scans the surface on which laser is to be irradiated with an elliptical beam other than a circular form or a line beam to modify the properties thereof, and a laser irradiation method.

SOLUTION: A laser irradiation apparatus 1 comprises: laser beam position movement means (4, 5) of moving the scanning position of a laser beam 3 which is to be irradiated on a target object 15 with an X scanning part 4 and a Y scanning part 5 in orthogonal relationship; laser beam rotation means 2 of rotating the laser beam 3 by a scanning angle (θi) round the optical axis center; a microprocessor 8 which controls the motion of these means; and memory 9 in which information associated with the control is stored. A scanning direction P1 is made to match a minor axis direction of the laser beam 3, and the laser beam 3 is made to run in the direction of the scanning angle (θi) which is set every prescribed movement position of the laser beam 3 changing by the moment.

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