| 摘要 |
<P>PROBLEM TO BE SOLVED: To eliminate waste of a nitrogen dioxide gas when performing sterilization processing of a clean room. <P>SOLUTION: In a sterilization system 1 for filling clean rooms R1-Rn with an NO<SB POS="POST">2</SB>gas generated in a gas supply system 30 and performing the sterilization processing, an accumulation tank 10 and solenoid valves RV11-RVn1; RV12-RVn2 are interposed among them. Then, the gas supply system 30 is made to continue generation of the NO<SB POS="POST">2</SB>gas while accumulating the NO<SB POS="POST">2</SB>gas in the accumulation tank 10 to first concentration at which the NO<SB POS="POST">2</SB>gas can be efficiently generated, the generation of the NO<SB POS="POST">2</SB>gas is temporarily stopped, and when the concentration becomes lower than a second concentration set lower than the first concentration by use of the gas accompanying supply to the clean rooms R1-Rn, the generation of the NO<SB POS="POST">2</SB>gas is restarted, that is, a so-called additional heating function is achieved. Thus, the NO<SB POS="POST">2</SB>gas is highly efficiently generated in an initial stage, and it is possible to go in and out of the clean rooms R1-Rn. Further, the amount of the NO<SB POS="POST">2</SB>gas to finally remain in the accumulation tank 10 is reduced. <P>COPYRIGHT: (C)2013,JPO&INPIT |
