| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a spiral coating device and spiral coating method which enables control of a gap with high precision. <P>SOLUTION: The spiral coating device includes a stage having a mounting surface for mounting a coated object, a rotation mechanism which rotates the stage in a rotation direction along the mounting surface, a coating nozzle which discharges and applies material on the coated object on the stage, a movement mechanism part which relatively moves the stage and the coating nozzle along the mounting surface in an intersecting direction intersecting with the rotation direction, and relatively moves them in an axial direction of the rotation, a nozzle position detecting part which detects positional information of a bottom surface of the coating nozzle in the axial direction of the rotation, and a position adjusting part which adjusts positions of the coating nozzle and the mounting surface in the axial direction based on the positional information of the coating nozzle. <P>COPYRIGHT: (C)2013,JPO&INPIT |
