| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection apparatus which is capable of accurately inspecting a semiconductor device, and a control method thereof. <P>SOLUTION: An inspection apparatus comprises a conductive shield member (122) which shields a semiconductor device (DUT) mounted in a socket (22) by an arm (1) from the periphery of the semiconductor device. The shield member is fixed to a holding surface (S3) of a holding section opposed to the socket so as to connect to a spring receptacle (24) and the arm during a mounting period in which the semiconductor device is mounted in the socket. The arm further includes a conductive strut (11) and an insulation section (123) which exists between a lower end of the strut and an opposite surface (S4) to the holding surface of the holding section. <P>COPYRIGHT: (C)2013,JPO&INPIT |
