| 摘要 |
<P>PROBLEM TO BE SOLVED: To surely shield radiation which is generated on the basis of electron beams, and to reduce an area for installing a conveyance structure which shields an electron beam irradiation device. <P>SOLUTION: A conveyance structure 200 comprises: an electron beam irradiation device 100; an irradiation region R which is provided on a conveyance passage 350 partitioned with a wall surface; a first passage 352 which constitutes a part of the conveyance passage; a second passage 354 which has a height in a perpendicular direction different from that of the first passage and is positioned in a distance from the irradiation region longer than that of the first passage; a first elevating passage 370 which connects the first passage and the second passage; and a shield section 330 which is provided at least either on a wall surface partitioning the first passage or on a wall surface partitioning the first elevating passage and shields the straight incidence of radiation from the first passage to the second passage. <P>COPYRIGHT: (C)2013,JPO&INPIT |
