发明名称 PROBE UNIT AND CIRCUIT BOARD INSPECTION DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To prevent the occurrence of short circuit and leakage and to achieve smooth probing. <P>SOLUTION: A probe unit comprises: a body part 11 including a first support part 31 in which a first insertion hole 31a is formed and a second support part 32 in which a second insertion hole 32a is formed; and a probe pin 12 which is supported by the body part 11 in a state that a tip part 21 and a base end part 22 thereof are respectively inserted into the first insertion hole 31a and the second insertion hole 32a and is configured in such a manner that a center part 23 is bendable when performing probing, with a first insulating layer 24 being formed on the peripheral surface of the center part 23 with a thickness that makes the diameter of the center part 23 larger than the diameter of the first insertion hole 31a. In a prescribed tip section A which is a part of the surface of the tip part 21 of the probe pin 12 excluding a portion which is in contact with a terminal 101 of a circuit board 100, a second insulating layer 25 is formed with a thickness which makes the diameter of the tip section A smaller than the diameter of the first insertion hole 31a. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013003002(A) 申请公布日期 2013.01.07
申请号 JP20110135253 申请日期 2011.06.17
申请人 HIOKI EE CORP 发明人 HORI SEIICHI
分类号 G01R1/073;G01R31/26;H01L21/66 主分类号 G01R1/073
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