| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high-frequency power distribution device having a small processing variation for each of a plurality of discharge spaces for processing a substrate, having a small power loss, and being capable of uniformly distributing a high-frequency power to an arbitrary number of parallel flat plate electrodes. <P>SOLUTION: A high-frequency power distribution device 4a supplying a high-frequency power from a high-frequency power source by distributing uniformly has: a power distribution member 30 branching an inputted high-frequency power into a plurality of high-frequency powers; coaxial transmission lines 35 transmitting the high-frequency powers branched by the power distribution member 30 to a plurality of parallel flat plate electrodes, and each comprising the center power feeding line and a ground line around the power feeding line; and an impedance adjustment mechanism 36 adjusting an input side impedance to reduce a current value. The power distribution member 30 has: a main body 31 comprising a plate-like conductor; a high-frequency power input part 32 inputting the high-frequency power to an input point 31a on one principal surface of the main body 31; and a plurality of high-frequency power output parts 33 arranged at an equal interval on a circumference centered at a point corresponding to an input point 31a on the other principal surface of the main body 31. <P>COPYRIGHT: (C)2013,JPO&INPIT |
