| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain the height and the volume of a component to be measured by accurately measuring an inner shape even if the object to be measured has a recessed shape surrounded with a wall. <P>SOLUTION: A table is movable in a height direction of a component to be measured while placing the component to be measured on its placement surface. An optical pattern is projected through an objective lens to the component to be measured placed on the placement surface in a direction vertical to the placement surface of the table. The table is moved step by step sequentially in the height direction of the component to be measured, the component to be measured to which the optical pattern is projected is imaged through the objective lens in every step movement, and an image of the optical pattern is captured. A plurality of images of the optical pattern captured by imaging in every step movement of the table are processed to obtain height information of each part of the component to be measured, and a height image or an image containing the height information of the component to be measured is produced, thereby measuring the component height. <P>COPYRIGHT: (C)2013,JPO&INPIT |
