| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and a system capable of forming a uniform plating film without disposing a through-hole even for an inner wall surface of a bag-shaped fine tube. <P>SOLUTION: The method for forming plating film for bag-shaped fine tube includes: a plasma cleaning step of irradiating the fine tube arranged in a vacuum environment with plasma to remove impurities on inner and outer wall surfaces; and a degreasing step of immersing the fine tube in the vacuum environment in such a state that the impurities are removed and air does not remain in the internal space into a degreasing liquid, replacing the vacuum environment with an atmospheric environment and, thereby, injecting the degreasing liquid into the whole of the internal space of the fine tube to perform degreasing treatment of the inner wall and the outer wall of the fine tube. The method further includes: a degreasing liquid cleaning step of replacing the degreasing liquid with cleaning liquid while preventing air from entering at least the internal space of the degreased fine tube to clean the fine tube; and a plating step of replacing the cleaning liquid with the plating liquid while preventing air from entering at least the internal space of the cleaned fine tube and performing pulse reverse electroplating for the fine tube. <P>COPYRIGHT: (C)2013,JPO&INPIT |
