| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique which improves productivity and reduces cost when manufacturing an aluminum substrate for magnetic recording medium having smooth surfaces by reducing surface roughness before polishing and reducing the amount of polishing. <P>SOLUTION: A manufacturing method for an aluminum substrate for magnetic recording medium includes a step for performing a phosphoric acid treatment on an aluminum substrate and a step for forming SiO<SB POS="POST">2</SB>film on the surfaces of the aluminum substrate after the phosphoric acid treatment by a plasma-enhanced chemical vapor deposition process using oxygen gas and organic siloxane gas. <P>COPYRIGHT: (C)2013,JPO&INPIT |
