| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stage device capable of moving a stage horizontally and rotating the stage around a vertical axis, the stage device being compact in size and simple in the structure. <P>SOLUTION: A stage device 1 includes: a base 2; and a stage 3 provided on the base 2 through an air bearing 61. On the facing surface of either the base 2 or the stage 3, a plurality of first primary magnetic flux generation parts 4a are provided in parallel to each other along a first moving direction which is parallel to the facing surfaces. Along a second moving direction which is parallel to the facing surfaces and orthogonal to the first moving direction, second primary magnetic flux generation parts 4b are provided. On the other facing surface, first and second secondary magnetic flux generation parts 5a and 5b are provided so as to face the first and second primary magnetic flux generation parts 4a and 4b. Magnetic pole faces of the first and second primary magnetic flux generation parts 4a and 4b and the first and second secondary magnetic flux generation parts 5a and 5b are each formed substantially parallel to the facing surfaces. <P>COPYRIGHT: (C)2013,JPO&INPIT |
