| 摘要 |
PURPOSE: A vacuum heat treatment device is provided to coat a heat-resisting coating part which contains Mo or Al2O3, and moreover W, Ta, or Sic, thereby reducing the manufacturing cost of a thermocouple protecting tube and enhancing the lifetime of a thermocouple. CONSTITUTION: A vacuum heat treatment device(100) comprises a chamber(10), an insulating member(20), a reaction container(40), a heating member(30), a temperature measuring part(50), a heat-resisting coating part(55). The insulating member(20) is placed inside the chamber(10). The reaction container(40) is place inside the insulating member(20). The heating member(30) is placed between the reaction container(40) and the insulating member(20). The heating member(30) heats the reaction container(40). The temperature measuring part(50) includes a thermocouple(51) and a thermocouple protecting tube(54). The thermocouple protecting tube(54) contains W, Ta, or Sic. The heat-resisting coating part(55) surrounds the thermocouple protecting tube(54).
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